Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497598 | Electrostatic chuck and method of making same | Wolfram Neff, Carlo Waldfried, Jakub Rybczynski, Michael J. Hanagan, Wade A. Krull | 2019-12-03 |
| 10395963 | Electrostatic chuck | — | 2019-08-27 |
| 10385454 | Diffusion resistant electrostatic clamp | Dale K. Stone, I-Kuan Lin, Julian G. Blake, Lyudmila Stone | 2019-08-20 |
| 10175133 | Sensor with protective layer | George Gonnella, Sung In Moon, Charles W. Extrand, John E. Pillion | 2019-01-08 |