Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10431493 | Doping control of metal nitride films | Annamalai Lakshmanan, Guodan Wei, Nicole Lundy, Paul F. Ma | 2019-10-01 |
| 10283352 | Precursors of manganese and manganese-based compounds for copper diffusion barrier layers and methods of use | Feng Q. Liu, David Knapp, David Thompson | 2019-05-07 |