Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395883 | Aperture size modulation to enhance ebeam patterning resolution | Shakul Tandon, Gabriele Canzi | 2019-08-27 |
| 10386722 | Ebeam staggered beam aperture array | Yan Borodovsky, Donald W. Nelson | 2019-08-20 |
| 10290528 | Ebeam align on the fly | Yan Borodovsky, Donald W. Nelson | 2019-05-14 |
| 10216087 | Ebeam universal cutter | Yan Borodovsky, Donald W. Nelson | 2019-02-26 |