Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10464807 | Semiconductor device, microphone and method for producing a semiconductor device | Stefan Barzen, Marc Fueldner | 2019-11-05 |
| 10469948 | Method for manufacturing an opening structure and opening structure | — | 2019-11-05 |
| 10405099 | MEMS device and method for producing a MEMS device | Stefan Jost, Stefan Geissler, Soenke Pirk | 2019-09-03 |
| 10405118 | Semiconductor devices having a membrane layer with smooth stress-relieving corrugations and methods of fabrication thereof | Alfons Dehe, Stefan Barzen, Wolfgang Klein | 2019-09-03 |