Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10405099 | MEMS device and method for producing a MEMS device | Wolfgang Friza, Stefan Geissler, Soenke Pirk | 2019-09-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10405099 | MEMS device and method for producing a MEMS device | Wolfgang Friza, Stefan Geissler, Soenke Pirk | 2019-09-03 |