Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10319905 | Method and system for performing post-etch annealing of a workpiece | David Hurley, Shigeru Tahara, Toru Ishii | 2019-06-11 |
| 10192956 | Method for producing fin structures of a semiconductor device in a substrate | Boon Teik Chan, Safak Sayan, Min Soo Kim, Roel Gronheid | 2019-01-29 |