Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504683 | Device and method for forming a plurality of charged particle beamlets | — | 2019-12-10 |
| 10453645 | Method for inspecting a specimen and charged particle multi-beam device | Pieter Kruit | 2019-10-22 |
| 10297418 | Method of reducing coma and chromatic aberration in a charged particle beam device, and charged particle beam device | — | 2019-05-21 |