Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395925 | Patterning material film stack comprising hard mask layer having high metal content interface to resist layer | Ekmini Anuja De Silva, Adra Carr, Shanti Pancharatnam, Indira Seshadri | 2019-08-27 |