Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10417359 | Optical metrology of lithographic processes using asymmetric sub-resolution features to enhance measurement | Robert John Socha | 2019-09-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10417359 | Optical metrology of lithographic processes using asymmetric sub-resolution features to enhance measurement | Robert John Socha | 2019-09-17 |