Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10437158 | Metrology by reconstruction | — | 2019-10-08 |
| 10417359 | Optical metrology of lithographic processes using asymmetric sub-resolution features to enhance measurement | Thomas I. Wallow | 2019-09-17 |