Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10325998 | High selectivity nitride removal process based on selective polymer deposition | Ravi K. Dasaka, Sebastian U. Engelmann, Nicholas C. M. Fuller, Masahiro Nakamura | 2019-06-18 |
| 10269924 | High selectivity nitride removal process based on selective polymer deposition | Ravi K. Dasaka, Sebastian U. Engelmann, Nicholas C. M. Fuller, Masahiro Nakamura | 2019-04-23 |