Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10280121 | Silicon carbide member for plasma processing apparatus | Michito Miyahara, Hideo Eto, Yukio Okudo, Makoto Saito, Hiroshi Sanda | 2019-05-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10280121 | Silicon carbide member for plasma processing apparatus | Michito Miyahara, Hideo Eto, Yukio Okudo, Makoto Saito, Hiroshi Sanda | 2019-05-07 |