Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10280121 | Silicon carbide member for plasma processing apparatus | Masahiro Okesaku, Michito Miyahara, Hideo Eto, Yukio Okudo, Makoto Saito | 2019-05-07 |
| 10276420 | Electrostatic chuck and semiconductor manufacturing apparatus | Shinya Ito, Eiichi Nagumo, Makoto Saito | 2019-04-30 |