Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10210962 | Charged particle beam device, optical device, irradiation method, diffraction grating system, and diffraction grating | Ken Harada, Teruo Kohashi | 2019-02-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10210962 | Charged particle beam device, optical device, irradiation method, diffraction grating system, and diffraction grating | Ken Harada, Teruo Kohashi | 2019-02-19 |