Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10170273 | Charged particle beam device, and method of manufacturing component for charged particle beam device | Takashi Ichimura, Hiroyuki Ito, Shinichi Kato, Hisaya Murakoshi, Tadashi Fujieda +3 more | 2019-01-01 |