Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522320 | Charged particle beam device and method for adjusting charged particle beam device | Tomohiko Ogata, Masaki Hasegawa, Katsunori Onuki, Noriyuki Kaneoka | 2019-12-31 |
| 10170273 | Charged particle beam device, and method of manufacturing component for charged particle beam device | Takashi Ichimura, Hiroyuki Ito, Shinichi Kato, Tadashi Fujieda, Tatsuya Miyake +3 more | 2019-01-01 |