Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497538 | Local alignment point calibration method in die inspection | Wei Fang, Kevin Liu, Fei Wang, Zhaohui Guo | 2019-12-03 |
| 10380731 | Method and system for fast inspecting defects | Wei Fang | 2019-08-13 |
| 10236156 | Apparatus of plural charged-particle beams | Weiming Ren, Shuai Li, Xuedong Liu, Zhongwei Chen | 2019-03-19 |