Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10382870 | Piezoelectric microphone | Junkai Zhan, Zonglin Zhou | 2019-08-13 |
| 10349186 | MEMS microphone | Junkai Zhan, Zonglin Zhou | 2019-07-09 |
| 10349187 | Acoustic sensor integrated MEMS microphone structure and fabrication method thereof | Junkai Zhan, Guanxun Qiu, Zonglin Zhou, Qinglin Song | 2019-07-09 |
| 10246323 | Cavity forming method for a sensor chip, manufacturing method thereof, chip and electronics apparatus | Qinglin Song | 2019-04-02 |
| 10233075 | Method for forming filter net on MEMS sensor and MEMS sensor | Junkai Zhan, Zonglin Zhou, Guanxun Qiu | 2019-03-19 |