MP

Martin Pilz

Globalfoundries: 1 patents #333 of 837Top 40%
📍 Dresden, DE: #112 of 384 inventorsTop 30%
Overall (2019): #354,696 of 560,194Top 65%
1
Patents 2019

Issued Patents 2019

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10185312 Insitu tool health and recipe quality monitoring on a CDSEM Daniel Fischer, Yvonne Jänicke, Stephan Melzig, Alexander Ullrich 2019-01-22