Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10185312 | Insitu tool health and recipe quality monitoring on a CDSEM | Daniel Fischer, Yvonne Jänicke, Stephan Melzig, Martin Pilz | 2019-01-22 |
AU
Alexander Ullrich
Overall (2019): #547,961 of 560,194Top 100%
1
Patents 2019