Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483713 | Laser apparatus and measurement unit | Seiji Nogiwa | 2019-11-19 |
| 10371469 | Device for controlling temperature of cooling water | Masazumi Komori, Osamu Wakabayashi | 2019-08-06 |
| 10340654 | Laser apparatus and extreme ultraviolet light generating system | Seiji Nogiwa | 2019-07-02 |
| 10250007 | Laser apparatus and method for adding chamber to laser apparatus | — | 2019-04-02 |
| 10224686 | Laser apparatus, EUV light generation system, and method of controlling laser apparatus | Naoya Takaoka, Toshio Yokozuka | 2019-03-05 |