Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483713 | Laser apparatus and measurement unit | Yasufumi Kawasuji | 2019-11-19 |
| 10340654 | Laser apparatus and extreme ultraviolet light generating system | Yasufumi Kawasuji | 2019-07-02 |