MH

Michael Himmelhaus

CG Carl Zeiss Smt Gmbh: 1 patents #71 of 205Top 35%
Overall (2019): #343,820 of 560,194Top 65%
1
Patents 2019

Issued Patents 2019

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10429731 Method and device for generating a reference image in the characterization of a mask for microlithography Carsten Schmidt 2019-10-01