Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10429731 | Method and device for generating a reference image in the characterization of a mask for microlithography | Michael Himmelhaus | 2019-10-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10429731 | Method and device for generating a reference image in the characterization of a mask for microlithography | Michael Himmelhaus | 2019-10-01 |