Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10473247 | Method of forming a pipe joint, pipe joint component, and pipe joint, fluid control device, fluid control unit and semiconductor fabrication apparatus including the pipe joint component | Kazunari Watanabe, Toshiyuki Inada, Izuru Shikata | 2019-11-12 |
| 10371271 | Fluid controller with diaphragm | Ichiro Tokuda, Akihiro Harada, Hidenori Kiso, Tomohiro Nakata, Michio Yamaji | 2019-08-06 |
| 10323757 | Diaphragm valve | Tomohiro Nakata, Michio Yamaji | 2019-06-18 |