Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10473247 | Method of forming a pipe joint, pipe joint component, and pipe joint, fluid control device, fluid control unit and semiconductor fabrication apparatus including the pipe joint component | Kazunari Watanabe, Toshiyuki Inada, Tsutomu Shinohara | 2019-11-12 |
| 10309549 | Valve device, fluid control apparatus, and semiconductor manufacturing apparatus | Taiji Chiba | 2019-06-04 |