Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10394127 | Pattern forming method and method for manufacturing electronic device | Wataru Nihashi, Hideaki Tsubaki, Toru Tsuchihashi | 2019-08-27 |
| 10324374 | Active light sensitive or radiation sensitive resin composition, active light sensitive or radiation sensitive film, mask blank provided with active light sensitive or radiation sensitive film, pattern forming method, method for manufacturing electronic device, electronic device and novel compound | Shuhei Yamaguchi, Natsumi Yokokawa, Koutarou Takahashi | 2019-06-18 |