Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388559 | Apparatus for depositing a layer on a substrate in a processing gas | Mohamed Elghazzali, Jurgen Weichart | 2019-08-20 |
| 10202682 | Method of sputtering and sputter system | Juergen Weichart | 2019-02-12 |