Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10403522 | Chamber for degassing substrates | — | 2019-09-03 |
| 10388559 | Apparatus for depositing a layer on a substrate in a processing gas | Sven Uwe Rieschl, Mohamed Elghazzali | 2019-08-20 |