Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10364494 | Substrate processing apparatus | Cha-young Yoo, Kyu Jin Choi, Ja Dae Ku, Jun Young Kim, Bong Ju Jung +3 more | 2019-07-30 |
| 10337103 | Substrate processing apparatus | Jun Jin Hyon, Byoung-Gyu Song, Yong-Ki Kim, Kyoung-Hun Kim, Chang Dol KIM +2 more | 2019-07-02 |
| 10287687 | Substrate processing device | Jae Ho Lee, Sang Ho Choi, Seung Hyun YOON | 2019-05-14 |
| 10199225 | Substrate processing apparatus | Woo Duck JUNG, Kyu Jin Choi, Seong Min HAN | 2019-02-05 |
| 10192760 | Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit | Dong Keun Lee, Kyung-Jin Chu, Il-Kwang Yang | 2019-01-29 |