Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10337103 | Substrate processing apparatus | Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Kyoung-Hun Kim, Chang Dol KIM +2 more | 2019-07-02 |
| 10283391 | Multiple gases providing method and multiple gases providing apparatus | Joo Hyun Cho, Chul-Goo Kang, Yong-Ki Kim, Jung Ki Min | 2019-05-07 |
| 10229845 | Substrate treatment apparatus | Byoung-Gyu Song, Kyong-Hun Kim, Yong-Ki Kim, Yang-Sik Shin, Chang Dol KIM | 2019-03-12 |