Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460071 | Shaped beam lithography including temperature effects | Akira Fujimura, Ryan Pearman, William E. Guthrie | 2019-10-29 |
| 10444629 | Bias correction for lithography | — | 2019-10-15 |