Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460071 | Shaped beam lithography including temperature effects | Harold Robert Zable, Ryan Pearman, William E. Guthrie | 2019-10-29 |
| 10431422 | Method and system for dimensional uniformity using charged particle beam lithography | Kazuyuki Hagiwara, Robert C. Pack | 2019-10-01 |
| 10317790 | Sub-resolution assist features in semiconductor pattern writing | Leo Hok Lai Pang | 2019-06-11 |
| 10290467 | Method and system for forming a pattern on a surface using multi-beam charged particle beam lithography | — | 2019-05-14 |