Showing 1–4 of 4 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Takayuki Toshima | Tokyo Electron Limited | 4 |
| 2 | Hiroshi Marumoto | Tokyo Electron Limited | 2 |
| 3 | Kazuki Kosai | Tokyo Electron Limited | 1 |
| 3 | Tatsuya Nagamatsu | Tokyo Electron Limited | 1 |
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