Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10345706 | Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition | Hyun-Ji SONG, Yun-Jun Kim, Go-Un Kim, Young Min Kim, Hea-Jung Kim +8 more | 2019-07-09 |
| 10312074 | Method of producing layer structure, layer structure, and method of forming patterns | Min Soo Kim, Hyun-Ji SONG, Sun-Hae Kang, Sung Min Kim, Sung Hwan Kim +15 more | 2019-06-04 |