Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10345706 | Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition | Hyun-Ji SONG, Yun-Jun Kim, Young Min Kim, Hea-Jung Kim, Joon-Young Moon +8 more | 2019-07-09 |
| 10287468 | CMP slurry composition for organic film and polishing method using same | Yong-Sik Yoo, Jung Min Choi, Dong-Hun Kang, Tae Wan Kim, Yong Kuk Kim | 2019-05-14 |