Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10457866 | Dry etching gas and dry etching method | Yosuke Nakamura, Masaki Fujiwara, Akifumi Yao | 2019-10-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10457866 | Dry etching gas and dry etching method | Yosuke Nakamura, Masaki Fujiwara, Akifumi Yao | 2019-10-29 |