Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10457866 | Dry etching gas and dry etching method | Yosuke Nakamura, Masaki Fujiwara, Hiroyuki Oomori | 2019-10-29 |
| 10460946 | Naturally oxidized film removing method and naturally oxidized film removing device | Jun LIN, Koji Takeya, Shinichi Kawaguchi, Mitsuhiro Tachibana, Kunihiro Yamauchi | 2019-10-29 |