Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395921 | Method of forming thin film | Young-Hoon Kim, Dae Youn Kim, Seung Woo Choi, Hyung Wook NOH, Yong Min Yoo | 2019-08-27 |
| 10364493 | Exhaust apparatus and substrate processing apparatus having an exhaust line with a first ring having at least one hole on a lateral side thereof placed in the exhaust line | Dae Youn Kim, Seung Wook Kim, Jin Seok Park, Jae-Hyun Kim | 2019-07-30 |