Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515795 | Method of depositing thin film | Young-Hoon Kim, Sang Wook Lee | 2019-12-24 |
| 10403523 | Substrate processing apparatus | Soo Hyun Kim, Izumi Arai | 2019-09-03 |
| 10395921 | Method of forming thin film | Young-Hoon Kim, Seung Woo Choi, Hyung Wook NOH, Yong Min Yoo, Hak Joo Lee | 2019-08-27 |
| 10364493 | Exhaust apparatus and substrate processing apparatus having an exhaust line with a first ring having at least one hole on a lateral side thereof placed in the exhaust line | Hak Joo Lee, Seung Wook Kim, Jin Seok Park, Jae-Hyun Kim | 2019-07-30 |
| 10358721 | Semiconductor manufacturing system including deposition apparatus | Hie Chul Kim, Hyun Soo Jang | 2019-07-23 |
| 10190214 | Deposition apparatus and deposition system having the same | Jong Won Shon, Sang Don Lee, Hyun Soo Jang | 2019-01-29 |