Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481509 | Vibration damping apparatus, lithography apparatus, and method of manufacturing article | Yoshihiro Morimoto, Hiromichi Hara, Masahiko Ogawa | 2019-11-19 |
| 10197926 | Exposure apparatus and method of manufacturing article | — | 2019-02-05 |