Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481509 | Vibration damping apparatus, lithography apparatus, and method of manufacturing article | Yoshihiro Morimoto, Masahiko Ogawa, Ryo Takai | 2019-11-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481509 | Vibration damping apparatus, lithography apparatus, and method of manufacturing article | Yoshihiro Morimoto, Masahiko Ogawa, Ryo Takai | 2019-11-19 |