Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10361069 | Ion source repeller shield comprising a labyrinth seal | Neil K. Colvin, Paul Silverstein | 2019-07-23 |
| 10361081 | Phosphine co-gas for carbon implants | Neil K. Colvin | 2019-07-23 |
| 10256069 | Phosphorous trifluoride co-gas for carbon implants | Neil K. Colvin | 2019-04-09 |
| 10170286 | In-situ cleaning using hydrogen peroxide as co-gas to primary dopant or purge gas for minimizing carbon deposits in an ion source | Neil K. Colvin | 2019-01-01 |