PS

Paul Silverstein

AT Axcelis Technologies: 1 patents #3 of 19Top 20%
📍 Somerville, MA: #188 of 538 inventorsTop 35%
🗺 Massachusetts: #5,264 of 14,267 inventorsTop 40%
Overall (2019): #317,288 of 560,194Top 60%
1
Patents 2019

Issued Patents 2019

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10361069 Ion source repeller shield comprising a labyrinth seal Neil K. Colvin, Tseh-Jen Hsieh 2019-07-23