Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10372045 | Method of calibrating a reluctance actuator assembly, reluctance actuator and lithographic apparatus comprising such reluctance actuator | Johannes Antonius Gerardus Akkermans, Bas Pieter Lemmen, Sjoerd Martijn Huiberts, Joeri Lof, Petrus Theodorus Rutgers +2 more | 2019-08-06 |