Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10437154 | Lithographic method | Andrey Nikipelov, Olav Waldemar Vladimir Frijns, Erik Roelof Loopstra, Wouter Joep ENGELEN | 2019-10-08 |
| 10381796 | Free electron laser | Petrus Wilhelmus SMORENBURG | 2019-08-13 |
| 10372045 | Method of calibrating a reluctance actuator assembly, reluctance actuator and lithographic apparatus comprising such reluctance actuator | Bas Pieter Lemmen, Sjoerd Martijn Huiberts, Joeri Lof, Petrus Theodorus Rutgers, Sven Antoin Johan Hol +2 more | 2019-08-06 |