Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10379057 | Illumination system, inspection tool with illumination system, and method of operating an illumination system | Filip Cauwenberghs, Johan DeGreeve, Pauline Begoc | 2019-08-13 |
| 10254663 | Lithographic apparatus and device manufacturing method involving a heater | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more | 2019-04-09 |