Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10296681 | Process based metrology target design | Shufeng Bai, Eric Kent, Yen-Wen Lu, Paul Anthony Tuffy, Jen-Shiang Wang +3 more | 2019-05-21 |
| 10296692 | Method and apparatus for design of a metrology target | Justin Ghan, David Harold Whysong | 2019-05-21 |