Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10501866 | Gas distribution apparatus for improved film uniformity in an epitaxial system | Robert Vyne, Timo Bergman, Lee Bode, Wentao Wang | 2019-12-10 |
| 10312129 | Variable adjustment for precise matching of multiple chamber cavity housings | — | 2019-06-04 |