Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10501866 | Gas distribution apparatus for improved film uniformity in an epitaxial system | Stephen Dale Coomer, Robert Vyne, Timo Bergman, Wentao Wang | 2019-12-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10501866 | Gas distribution apparatus for improved film uniformity in an epitaxial system | Stephen Dale Coomer, Robert Vyne, Timo Bergman, Wentao Wang | 2019-12-10 |